发明名称 |
Method of fabricating micromechanical components with free-standing microstructures or membranes |
摘要 |
A method is disclosed of fabricating micromechanical components provided with free-standing microstructures or membranes with predetermined mechanical stress, by initially depositing a sacrificial layer on a substrate followed by depositing a polysilicon layer on the sacrificial layer by a gaseous phase deposition and, finally, at least partial removal of the sacrificial layer. During deposition of the polysilicon layer, the process pressure selected determined the type of stress in the polysilicon layer, and the value of the stress is set by the process temperature selected. The process pressure is above the pressure range used in LPCVD reactors. |
申请公布号 |
US7919345(B1) |
申请公布日期 |
2011.04.05 |
申请号 |
US19950849036 |
申请日期 |
1995.11.21 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V. |
发明人 |
KIRSTEN MARIO;LANGE PETER;WENK BEATRICE;RIETHMUELLER WERNER |
分类号 |
H01L21/00;B81C1/00;C23C16/24;C23C16/52;H01L21/205 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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