发明名称 |
Reduction of substrate optical leakage in integrated photonic circuits through localized substrate removal |
摘要 |
Structures including optical waveguides disposed over substrates having a chamber or trench defined therein, and methods for formation thereof.
|
申请公布号 |
US7920770(B2) |
申请公布日期 |
2011.04.05 |
申请号 |
US20080113580 |
申请日期 |
2008.05.01 |
申请人 |
MASSACHUSETTS INSTITUTE OF TECHNOLOGY |
发明人 |
HOLZWARTH CHARLES;ORCUTT JASON S.;POPOVIC MILOS;HOYT JUDY L.;RAM RAJEEV |
分类号 |
G02B6/10;G02B6/12 |
主分类号 |
G02B6/10 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|