发明名称 Contactless flash memory array
摘要 A method for forming a contactless flash memory cell array is disclosed. According to an embodiment of the invention, a plurality of active regions is formed on a substrate. An insulating layer is then deposited over the active regions, and a portion of the insulating layer is removed to form a one-dimensional slot and to provide access to the active regions. A bit line is then formed in the slot in contact with the active regions.
申请公布号 US7919377(B2) 申请公布日期 2011.04.05
申请号 US20080070928 申请日期 2008.02.22
申请人 INTEL CORPORATION 发明人 LEE EVERETT B.
分类号 H01L21/336;G03F7/20;H01L21/3205;H01L21/4763;H01L21/82;H01L21/8238;H01L21/8247;H01L27/00;H01L27/115;H01L29/76 主分类号 H01L21/336
代理机构 代理人
主权项
地址