发明名称 CMOS image sensor with multi-layered planarization layer and method for fabricating the same
摘要 A CMOS image sensor and a method for fabricating the same for preventing contamination and peeling of an array of micro lenses. The CMOS image sensor includes a plurality of photodiodes formed on and/or over a substrate, an insulating film formed on and/or over an entire surface of the substrate including the photodiodes, color filter layers formed on and/or over the insulating film, a first oxide film formed on and/or over the color filter layers, an ion-rich oxide film formed by injecting silicon ions into the first oxide film, a second oxide film formed on and/or over the ion-rich oxide film, and a micro lens pattern formed corresponding to the photodiodes by patterning the second oxide film.
申请公布号 US7919351(B2) 申请公布日期 2011.04.05
申请号 US20080211124 申请日期 2008.09.16
申请人 DONGBU HITEK CO., LTD. 发明人 HWANG JONG-TAEK
分类号 H01L21/00;H01L21/31;H01L21/469;H01L31/00;H01L31/062;H01L31/113 主分类号 H01L21/00
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