PARTICLE BEAM MASS SPECTROSCOPY

摘要

PURPOSE: A particle beam mass spectroscopy is provided to improve the productivity and yield by monitoring the nano particles. CONSTITUTION: An aerodynamic lens(10) forms a particle beam by accelerating the gas flow. An electron gun(30) forms charged particle beam by ionizing the particle beam and accelerating thermoelectron. A deflector(40) refracts the charged particle beam by the kinetic energy to charge ratio. A sensor(50) measures current by the charged particle beam. A magnetic field generating unit creates restriction magnet field for restricting thermoelectron.