Förfarande för framställning av högkonformala beläggningar

摘要

A method to produce coatings and films by spin-on, spray, slit and dip coating is presented. In the method a liquid phase siloxane resin composition is applied on a substrate. The composition comprises a siloxane resin in a solvent blend containing at least one low boiling solvent and at least one high boiling non-solvent. It is suitable for producing highly conformal coatings and films in the semiconductor industry.