| 摘要 |
An atomic force microscope and an image compensation method of the same are provided to perform surface of a sample at superhigh speed using an open loop mode. An atomic force microscope comprises a three-dimensional scanner(100), a sensing unit(200), an optical detector(150), a controller(300). The three-dimensional scanner comprises a stage(110) and a cantilever(120). A sample(500) is settled on the stage. The cantilever pins the surface of a sample. While moving the stage or the cantilever along the fixed direction, the three-dimensional scanner scans. The sensing unit detects an actual XY location in which the three-dimensional scanner moves based on a real coordinate. The optical detector detects the warp degree of the cantilever by measuring the reflection light of a laser beam which is incident in the cantilever. The controller amends the image distortion by the internal impact based on the real coordinate by the sensing unit. |
