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发明名称
METHOD OF THREE-DIMENSIONAL MICROFABRICATION AND HIGH-DENSITY THREE-DIMENSIONAL FINE STRUCTURE
摘要
申请公布号
KR101026507(B1)
申请公布日期
2011.04.01
申请号
KR20067023782
申请日期
2004.04.13
申请人
发明人
分类号
H01L21/20;B82Y40/00;H01L21/203;H01L21/26;H01L33/00;H01S5/34
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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