| 摘要 |
PROBLEM TO BE SOLVED: To highly accurately prevent a table of a sample stage used for an optical microscope and an electron microscope from inclining when the table of the sample stage is moved to a predetermined position in micron order. SOLUTION: In a positioning stage in which the table 102 is slid in the horizontal direction or a rocking direction or the vertical direction with respect to a fixed base 101, and is attached to it, the table 102 is attached to the fixed base 101 via a cross roller guide mechanism by sliding, and magnets 105 are arranged in a surface of the fixed base 101 facing the roller races 109 of the cross roller guide mechanism on the table 102 side. Thereby, the table 102 is surely kept at a standstill by mutually attaching the fixed base 101 and the table 102 with the magnetism of the magnets 105 in a state that the table 102 is moved and is at the predetermined position. COPYRIGHT: (C)2011,JPO&INPIT
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