发明名称 SOLID-STATE IMAGING DEVICE AND MANUFACTURING METHOD FOR THE SAME
摘要 A MOS solid-state imaging device having: a semiconductor substrate provided with a pair of source and drain regions in a pixel area, the pair of source and drain regions constituting part of a transistor in the pixel area; an insulating film formed over the semiconductor substrate; a wiring layer formed over the insulating film; and a contact plug penetrating through the insulating film to connect either one of the pair of source and drain regions with the wiring layer, wherein a surface area of said one of the pair of source and drain regions is silicided, the surface area contacting with the contact plug, and a width of the surface area is equal to a width of the contact plug.
申请公布号 US2011073971(A1) 申请公布日期 2011.03.31
申请号 US20100893565 申请日期 2010.09.29
申请人 TAKEDA TOMOTSUGU 发明人 TAKEDA TOMOTSUGU
分类号 H01L31/02;H01L21/18 主分类号 H01L31/02
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