PROBE APPARATUS AND TESTING APPARATUS

摘要

A probe apparatus, which transmits and receives signals to and from a target device, comprises: a contacting unit that contacts with a terminal of the target device to make an electrical connection with the target device; a non-contacting unit that transmits and receives signals to and from the target device without contacting with any terminal of the target device; and a holding unit that holds the contacting and non-contacting units in such a manner that the relative positions of the contacting and non-contacting units can be shifted in a connecting direction in which the non-contacting unit would be connected with the corresponding terminal of the target device.