| 摘要 |
PROBLEM TO BE SOLVED: To provide a swing nozzle unit having large strength and excellent corrosion-resistance, and also to provide a substrate treatment apparatus having the same. SOLUTION: The substrate treatment apparatus comprises a substrate support member including a spin head with a substrate mounted thereon, a treatment vessel disposed so as to surround the spin head to collect a substrate treatment fluid scattered from the substrate, and a swing nozzle unit for spraying the treatment fluid to the substrate mounted to the spin head while being rotated in a swinging motion where the swing nozzle unit comprises an inner resin pipe having an inner passage in which the treatment liquid supply tube is disposed, a metal pipe disposed so as to surround the inner resin pipe, a nozzle having a nozzle body formed of an outer resin pipe disposed so as to surround the metal pipe, and a drive unit adapted to rotate the nozzle in aθ-axis direction and move it up and down. COPYRIGHT: (C)2011,JPO&INPIT |
