发明名称 SEMICONDUCTOR DEVICE WITH BURIED BIT LINES INTERCONNECTED TO ONE-SIDE-CONTACT AND FABRICATION METHOD THEREOF
摘要 A semiconductor device with reduced resistance of a buried bit line, and a method for fabricating the same. The method for fabricating a semiconductor device includes etching a semiconductor substrate to form a plurality of active regions which are separated from one another by trenches formed in between, forming a side contact on a sidewall of each active region, and forming metal bit lines, each filling a portion of a respective trench and connected to the side contact.
申请公布号 US2011073925(A1) 申请公布日期 2011.03.31
申请号 US20090649684 申请日期 2009.12.30
申请人 PARK EUN-SHIL;EUN YOUNG-SEOK;LEE KEE-JEUNG;KIM MIN-SOO 发明人 PARK EUN-SHIL;EUN YOUNG-SEOK;LEE KEE-JEUNG;KIM MIN-SOO
分类号 H01L27/108;H01L21/8242 主分类号 H01L27/108
代理机构 代理人
主权项
地址