发明名称 LASER SYSTEM FOR PROCESSING SOLAR WAFERS IN A CARRIER
摘要 An apparatus and method for processing the solar cell substrates is provided. In one embodiment, a laser firing chamber for processing solar cell substrates placed in a carrier, comprising a laser module located at a side of the carrier, the laser module being adapted to generate and direct multiple laser beams over an entire surface of a plurality of solar cell substrates, and a transport adapted to convey the carrier through an outputting region of the laser beams.
申请公布号 US2011076847(A1) 申请公布日期 2011.03.31
申请号 US20100891525 申请日期 2010.09.27
申请人 APPLIED MATERIALS, INC. 发明人 AQUI DEREK;ZUNIGA STEVEN M.;SUBBARAMAN VENKATESWARAN;LIEBSCHER KIRK;ALEXANDER JOHN;ZHANG ZHENHUA;RANA VIRENDRA V.S.
分类号 H01L21/768 主分类号 H01L21/768
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