发明名称 |
SYSTEM AND METHOD FOR PERFORMING PHOTOTHERMAL MEASUREMENTS AND RELAXATION COMPENSATION |
摘要 |
A device and methods for performing a photothermal measurement and relaxation compensation of a sample are disclosed. The device may include a probe beam source, a pump beam source, a sample, and a detector array. A method may include adjusting an intensity modulated pump beam power, adjusting a probe beam power to increase a response measurement location temperature and increase a modulated optical reflectance signal, directing the intensity modulated pump beam and the probe beam along a measurement path to a response measurement location on a sample for periodically exciting a region on the sample, detecting a reflected portion of the probe beam, and calculating an implantation dose. |
申请公布号 |
WO2011008478(A3) |
申请公布日期 |
2011.03.31 |
申请号 |
WO2010US40063 |
申请日期 |
2010.06.25 |
申请人 |
KLA-TENCOR CORPORATION;ROTTER, LAWRENCE D.;WANG, DAVID Y.;SHAUGHNESSY, DERRICK;SENKO, MARK |
发明人 |
ROTTER, LAWRENCE D.;WANG, DAVID Y.;SHAUGHNESSY, DERRICK;SENKO, MARK |
分类号 |
G01N25/72;G01N21/63;H01L21/66 |
主分类号 |
G01N25/72 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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