Sensor mit Halbleiterchip und Schaltkreischip

摘要

A sensor (100) comprises semiconductor chip having sensing portion for detecting physical quantity; circuit chip (20); and first and second films. The sensing portion is on a first side of the chip, the first side being electrically connected to the circuit chip through a bump (40), and faces the circuit chip so that the sensing portion also faces the circuit chip. The first film is on the first side of the chip, covers the sensing portion, and is made of resin. The second film is made of resin, and is on a second side of the chip.