INSPECTION RECIPE AUTOMATIC GENERATION APPARATUS, INSPECTION RECIPE AUTOMATIC GENERATION PROGRAM, AND RECORDING MEDIUM WHERE THE SAME IS RECORDED

摘要

PROBLEM TO BE SOLVED: To secure and facilitate an inspection step for a substrate processing apparatus by automatically generating a recipe for inspecting the substrate processing apparatus. SOLUTION: A controller 15 of the substrate processing apparatus includes a computer 16 and a storage device 19. The storage device 19 is stored with a substrate processing control program and an inspection recipe automatic generation program, and further can be stored with the recipe, configuration definition data and operation condition data. The computer 16 executes the inspection recipe automatic generation program to generate and register an inspection recipe in which processing procedures for allowing a plurality of components that the substrate processing apparatus has to operate are described in the storage device 19. At this time, the computer 16 generates the processing procedures constituting the inspection recipe on the basis of the configuration definition data and operation condition data. COPYRIGHT: (C)2011,JPO&INPIT