| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid droplet jetting head and a liquid droplet jetting device capable of efficiently using strain energy of a piezoelectric element for deformation of a diaphragm, while suppressing peeling at a boundary between the diaphragm and the electrode of the piezoelectric element. SOLUTION: The liquid droplet jetting head 600 includes a piezoelectric actuator having a first diaphragm 2a, a second diaphragm 2b formed on the first diaphragm 2a, a first conductive layer 10 formed on the second diaphragm 2b, a piezoelectric layer 30 formed on the first conductive layer 10, and a second conductive layer 20 formed on the piezoelectric layer 30. The second diaphragm 2b is composed of zirconium oxide whose Young's modulus is 230 GPa or more and 270 GPa or less. COPYRIGHT: (C)2011,JPO&INPIT
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