发明名称 APPARATUS FOR MANUFACTURING SILICON INGOTS
摘要 The present invention relates to an apparatus for manufacturing silicon ingots, comprising: a chamber; a crucible installed in the chamber; a heating unit for heating the crucible; a crucible-mounting unit on which the crucible is placed; and at least two or more water-cooling rod groups arranged below the crucible-mounting unit, wherein said at least two or more water-cooling rod groups are spaced apart from each other about the crucible mounting unit and connected to respective water supply pipes.
申请公布号 WO2011037393(A2) 申请公布日期 2011.03.31
申请号 WO2010KR06473 申请日期 2010.09.20
申请人 SEMI-MATERIALS CO., LTD.;LEE, GEUN-TEK;PARK, SUNG-EUN;PARK, JONG-HOON 发明人 LEE, GEUN-TEK;PARK, SUNG-EUN;PARK, JONG-HOON
分类号 C30B21/02 主分类号 C30B21/02
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