| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrying apparatus and a stocker, simplifying operations and mechanisms for delivering carrying targets. SOLUTION: The carrying apparatus and the stocker are characterized by including a carrying apparatus which has a carrying container 1 for receiving the carrying target, a carrying means 2 for carrying and delivering the carrying target together with the carrying container 1, a support mechanism 3 disposed on the carrying container 1 and supporting the carrying container 1 in a movable state or in a vibration-attenuating and movable state, and a driving mechanism 4 of the carrying container 1 disposed on the carrying means 2, and is used for carrying and delivering the carrying target, a stocker 13 (13a) which is a stocker for receiving the carrying target together with the carrying container 1 delivered from the carrying apparatus, and has a guide member 10 capable of being slid to a delivering position, a carrying container 1-positioning and holding mechanism disposed on the carrying container 1 or the stocker 13 (13a). COPYRIGHT: (C)2011,JPO&INPIT
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