| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a diamond radiation detector which is improved in sensitivity and durability. SOLUTION: The diamond radiation detector is manufactured, by growing an overlayer 12 composed of high-purity single-crystal diamond on the surface of a substrate 10 constituted of boron-doped diamond, and then forming an interdigital electrode array 16 on the overlayer 12 on the surface of the substrate 10. Here, the grain size of the overlayer 12 is set comparable to that of the substrate 10 and thereby to obtain superior performance and improve the durability of the diamond radiation detector. COPYRIGHT: (C)2011,JPO&INPIT
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