| 摘要 |
<p>A fixed mirror (14), a BS (13), and a drive mechanism (21) are integrally and directly supported by means of a supporting section (22). Therefore, even if the drive mechanism (21) and the supporting section (22) vibrate when a moving mirror (15) is driven, the vibration is propagated at the same time to the fixed mirror (14) and the BS (13) via the same supporting section (22). Thus, generation of an optical path difference in the optical path between the BS (13) and the fixed mirror (14) due to the vibration is suppressed, and highly accurate interference can be provided.</p> |
