STOCKER SYSTEM

摘要

PURPOSE: A stocker system is provided to reduce a tact time of transferring a cassette by transferring cassette through at least three stocker. CONSTITUTION: In a stocker system, a first cassette load unit(100) comprises a plurality of first cells(110) in which a cassette accommodating substrates is loaded. A second cassette loading unit(200) is arranged in parallel with the first cassette loading unit. The second cassette loading unit include a plurality of second cells. A rail(400) is arranged between first and the second cassette load units. Stokers(300a-300b) is combined with the rail to be movable.