| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric device that prevents variation in oscillation frequency. SOLUTION: The method of manufacturing the piezoelectric device includes: a sealing part-step part forming process of forming, a sealing part provided to surround the outer periphery of one principal surface of an element mounting member provided with a pair of piezoelectric vibrating element mounting pads on the one principal surface, and a step part provided to surround the outer periphery more inside than the sealing part, by a photosensitive polymer material; a piezoelectric vibrating element mounting process of mounting a piezoelectric vibrating element on the pair of piezoelectric element mounting pads with a conductive adhesive; a piezoelectric vibrating element fixing process of storing the element mounting member in the inner space of a curing furnace, and heating and curing the conductive adhesive to conductively fix the piezoelectric vibrating element mounting pads and piezoelectric vibrating element; and a lid member joining process of joining a lid member and the sealing part of the element mounting member together. COPYRIGHT: (C)2011,JPO&INPIT |
