FILM FORMATION APPARATUS, VIBRATOR USING FILM FORMATION APPARATUS, AND FILM FORMATION METHOD

摘要

PROBLEM TO BE SOLVED: To heighten the accuracy of a coating region in object treatment regain of object to be coated with a coating liquid. SOLUTION: A sensitive film solution L is suctioned by and kept in a micro-capillary 20 and the sensitive film solution L is applied to a vibrator 100 to form a sensitive film 150 while the pressure to be applied to the micro-capillary 20 being adjusted correspondingly to the size of a region of the vibrator 100 on which the sensitive film 150 is to be formed. At that time, it is preferable that the region of the vibrator 100 on which the sensitive film 150 is to be formed is defined by a film, a line, or a groove of a material with high compatibility with the sensitive film solution L. COPYRIGHT: (C)2011,JPO&INPIT