| 摘要 |
PROBLEM TO BE SOLVED: To provide a convenient, compact, and lightweight ethylene oxide monitor capable of precisely measuring a low-concentration ethylene oxide, without using incidental equipment, such as generators of operating gas and hydrogen, at all. SOLUTION: High-sensitivity and stable operation of a gas chromatograph to which a semiconductor gas sensor having high selectivity is fitted demands that a carrier gas hot possess hydrocarbons but has appropriate moisture. The carrier gas is obtained by a configuration comprising a compact compressor for compressing and pressurizing the ambient air, a platinum catalyst furnace, capable of oxidizing and removing hydrocarbons contained in the air, and a moisture-temperature control cylinder filled with a carefully selected moisture adjusting agent, and the ultra-high-sensitivity ethylene oxide monitor is achieved by a mechanism including a separation-detection section for a semiconductor gas sensor type gas chromatograph, in a configuration having a moisture-adjusting mechanism (carrier gas supply section) for managing the carrier gas and excluding incidental devices of operating gas or the like, and a control section by using a microprocessor. COPYRIGHT: (C)2011,JPO&INPIT
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