| 摘要 |
PROBLEM TO BE SOLVED: To provide a clamp mechanism of a probe card capable of reliably preventing the probe card from falling. SOLUTION: The clamp mechanism 10 includes: a cylinder ring 11 fixed to a lower surface of an insert ring 21; a piston ring 12 elevated while being fitted to the cylinder ring 11; and an outer ring 13 connected to the piston ring 12 and supporting the probe card 30. Further, the clamp mechanism 10 includes: a deep groove 21A formed over the entire periphery of an outer peripheral section on a lower surface of the insert ring 21 and supplying and discharging compressed air; an O-ring 14 for maintaining internal compressed air at prescribed pressure within the deep groove 21A; an annular projection formed over the entire periphery on an upper surface of the piston ring 12 and elevating a seal member within the deep groove 21A by the piston ring 12; and a plurality of coil springs 15 elastically installed between a flange section 11B of the cylinder ring 11 and a ring section 12B of the piston ring 12 with a prescribed interval in a circumferential direction. COPYRIGHT: (C)2011,JPO&INPIT
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