| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect inspection device capable of outputting the inspection result of the defect related to the whole of an inspection target surface even if there are many defects, and a defect inspection method. SOLUTION: The defect inspection device 1 includes a setting part 2 and an inspection part 3. The setting part 2 sets target inspection coverage showing inspection coverage becoming a target at each predetermined defect size. The inspection part 3 specifics a defect becoming an inspection target from the defect on the inspection target surface 4a of a substrate 4 so that the inspection coverage related to the defect of the defect size becomes the target inspection coverage of the defect size at each defect size and outputs data related to the specified defect as the inspection result related to the whole of the inspection target surface 4a. COPYRIGHT: (C)2011,JPO&INPIT
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