| 摘要 |
A device that is capable of simultaneously inspecting both sides of surfaces of a magnetic disk to detect defects thereon includes a front-side defect detecting section and a back-side defect detecting section each of which optically detect a scratch and a defect that are present on the front and back surfaces of the magnetic disk, to improve a throughput for inspection. The back-side defect detecting section has an optical path changing section that reflects a laser beam emitted by a laser light source to change an optical path thereof and thereby to direct the laser beam toward the back surface of the magnetic disk and that reflects scattered light that has been collected by a Fresnel lens to change an optical path thereof and thereby to direct the scattered light toward a first photoelectric converter.
|
