| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate conveyance apparatus and a substrate conveyance method that can convey substrates more quickly from a first substrate storage portion to a second substrate storage portion and to provide a substrate processing system improved in throughput. SOLUTION: In the substrate conveyance apparatus 50, forks 54a and 54b are separated with an interval of a preset fork pitch P3 in a vertical direction. When each fork 54a or 54b takes out a substrate from the first substrate storage portion 20, the fork 54a or 54b moves upward by a preset takeout stroke ST1 from the pre-takeout position below the substrate to lift the substrate and hold it. The fork pitch P3 is set as the total amount of a first pitch P1 of a plurality of substrates stored in the first substrate storage portion 20 and the takeout stroke ST1. COPYRIGHT: (C)2011,JPO&INPIT
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