发明名称 SEMICONDUCTOR APPARATUS AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor apparatus by which the deterioration of rewriting property is suppressed. SOLUTION: In a memory cell region RM, a magnetoresistive element 18 in a semiconductor magnetic storage apparatus is formed in an array shape in a mode that the magnetoresistive element is arranged at a part where a digit line 3 extending in one direction intersects a bit line 32 extending in the direction substantially orthogonal to the digit line 3. The digit line 3 and the bit line 32 have such a wiring structure constituted by covering copper films 3b and 31a to be a wiring body with clad layers 3a and 36a. One end side of the magnetoresistive element 18 is electrically connected to the bit line 32 via a top via 25a formed from a non-magnetic material. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011066190(A) 申请公布日期 2011.03.31
申请号 JP20090215385 申请日期 2009.09.17
申请人 RENESAS ELECTRONICS CORP 发明人 MATSUDA AKIFUMI;ASHIDA MOTOI;UENO SHUICHI;FUKUI KATSUICHI;HIRANO SHINYA;MURANAKA MASASHI;OMORI KAZUYUKI
分类号 H01L27/105;H01L21/8246;H01L43/08 主分类号 H01L27/105
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