发明名称 |
SEMICONDUCTOR APPARATUS AND METHOD OF MANUFACTURING THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor apparatus by which the deterioration of rewriting property is suppressed. SOLUTION: In a memory cell region RM, a magnetoresistive element 18 in a semiconductor magnetic storage apparatus is formed in an array shape in a mode that the magnetoresistive element is arranged at a part where a digit line 3 extending in one direction intersects a bit line 32 extending in the direction substantially orthogonal to the digit line 3. The digit line 3 and the bit line 32 have such a wiring structure constituted by covering copper films 3b and 31a to be a wiring body with clad layers 3a and 36a. One end side of the magnetoresistive element 18 is electrically connected to the bit line 32 via a top via 25a formed from a non-magnetic material. COPYRIGHT: (C)2011,JPO&INPIT
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申请公布号 |
JP2011066190(A) |
申请公布日期 |
2011.03.31 |
申请号 |
JP20090215385 |
申请日期 |
2009.09.17 |
申请人 |
RENESAS ELECTRONICS CORP |
发明人 |
MATSUDA AKIFUMI;ASHIDA MOTOI;UENO SHUICHI;FUKUI KATSUICHI;HIRANO SHINYA;MURANAKA MASASHI;OMORI KAZUYUKI |
分类号 |
H01L27/105;H01L21/8246;H01L43/08 |
主分类号 |
H01L27/105 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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