SOAKING PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a compact and inexpensive soaking processing device capable of achieving accurate soaking. SOLUTION: The soaking processing device includes: a plate 1 with a plurality of grooves 2 formed in parallel to one another on a back face 1b; pipe vessels 3 extending along the grooves 2 and filled with operating fluid 31 by evacuating internal spaces 30; and heaters 6 for heating outer peripheral surfaces 13 of the pipe vessels 3. The pipe vessel 3 is partially fitted in the groove 2, and a portion of the outer peripheral surface 13 thermally contacts the groove 2. The heater 6 thermally contacts the outer peripheral surface 13 of the pipe vessel 3 located outside the groove 2. COPYRIGHT: (C)2011,JPO&INPIT