| 摘要 |
A transparent conductive film and a fabrication method thereof are provided. The transparent conductive film includes a plurality of oxide atomic layers, containing a plurality of multi-oxide atomic layers, wherein a single multi-oxide atomic layer has more than one kind of uniformly mixed oxide. The method includes providing more than one kind of oxide precursor which is individually introduced into atomic layer deposition equipment through different sources, wherein the oxide precursors are consecutively introduced into the atomic layer deposition equipment, so that the oxide precursors are simultaneously present in the atomic layer deposition equipment, forming a uniform mixture for settling onto the substrate. Then, an oxidant is provided to react with the oxide precursors to form a single multi-oxide atomic layer. The above mentioned steps are repeated to form a plurality of multi-oxide atomic layers.
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