<p>Disclosed are systems and methods for time differential reticle inspection. Contamination is detected by, for example, determining a difference between a first signature of at least a portion of a reticle and a second signature, produced subsequent to the first signature, of the portion of the reticle.</p>
申请公布号
WO2011035946(A1)
申请公布日期
2011.03.31
申请号
WO2010EP60354
申请日期
2010.07.16
申请人
ASML HOLDING N.V.;CATEY, ERIC;HARNED, ROBERT;SHMAREV, YEVGENIY;THARALDSEN, ROBERT;JACOBS, RICHARD
发明人
CATEY, ERIC;HARNED, ROBERT;SHMAREV, YEVGENIY;THARALDSEN, ROBERT;JACOBS, RICHARD
