MICROMACHINING SYSTEM USING EXCIMER LASER BEAM AND CONTROL METHOD THEREOF

摘要

PURPOSE: A micromachining system using excimer laser beam and a control method thereof are provided to reduce the time for machining processes by determining the optimum position of masks according to the variation of laser beam passing through the masks. CONSTITUTION: A micromachining system using excimer laser beam comprises a laser generator(110), a mask block(130), a measurement block(140), an administrator terminal(190), and a control block(150). The laser generator outputs excimer laser beam. The mask block includes a plurality of masks which are arranged to pass the generated excimer laser beam therethrough. The measurement block is arranged under the masks within the mask block and measures the output of the excimer laser beam passing through the masks. The administrator terminal confirms information on the location of the mask block corresponding to the maximum output and outputs a control signal for controlling the location of the mask block. The control block controls the location of the mask block based on the control signal.