摘要 |
PROBLEM TO BE SOLVED: To provide a static eliminator (for example, an ionizer) suitable for use in a clean room causing little or no dust. SOLUTION: In the static eliminator including at least one discharge electrode 3 for ionizing by applying a high voltage to air and generating ions, and a power supply 1 for supplying electric power to the discharge electrode 3, at least part of the discharge electrode 3 includes a conductive vanadate glass obtained by a process in which a conductive vanadate glass obtained by preparing a mixture containing vanadate, melting and rapidly cooling the mixture, or a conductive vanadate glass obtained by further performing an annealing treatment on the glass, is immersed in an aqueous liquid medium. COPYRIGHT: (C)2011,JPO&INPIT
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