| 摘要 |
PROBLEM TO BE SOLVED: To provide a DC test apparatus that supplies a high-precision voltage or current at high speed even to a capacitive load and a semiconductor inspection apparatus employing the same. SOLUTION: The DC test apparatus for performing a DC test on an object under measurement having capacitive load characteristics includes: a phase compensation circuit including a series circuit of a resistor and a capacitor connected in parallel to the capacitive load of the object under measurement; and a current detection circuit for detecting only a charging and discharging current with respect to the phase compensation circuit. The current detection circuit calculates a voltage level, thereby detecting only a current passing through the object under measurement. COPYRIGHT: (C)2011,JPO&INPIT
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