发明名称 METHOD FOR FORMING A VERTICAL THIN-FILM LITHIUM-ION BATTERY
摘要 A method for forming a lithium-ion type battery, including the successive steps of: forming, in a substrate, a trench; successively and conformally depositing a stack including a cathode collector layer, a cathode layer, an electrolyte layer, and an anode layer, this stack having a thickness smaller than the depth of the trench; forming, over the structure, an anode collector layer filling the space remaining in the trench; and planarizing the structure to expose the upper surface of the cathode collector layer.
申请公布号 US2011076568(A1) 申请公布日期 2011.03.31
申请号 US20100877356 申请日期 2010.09.08
申请人 STMICROELECTRONICS (TOURS) SAS 发明人 BOUILLON PIERRE
分类号 H01M2/16;H01M6/50 主分类号 H01M2/16
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