| 发明名称 |
SURFACE ACOUSTIC WAVE DEVICE AND SURFACE ACOUSTIC WAVE BIOSENSOR |
| 摘要 |
A surface acoustic wave device, including: a piezoelectric substrate; an interdigitated transducer electrode disposed on the substrate; an oxide film disposed on surface of the interdigitated transducer electrode; and a hydrophobic film disposed on a surface of the oxide film.
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| 申请公布号 |
US2011073474(A1) |
申请公布日期 |
2011.03.31 |
| 申请号 |
US20100700307 |
申请日期 |
2010.02.04 |
| 申请人 |
SAMSUNG ELECTRONICS CO., LTD |
发明人 |
CHO EUN CHOL;LEE HUN JOO;LEE SOO SUK |
| 分类号 |
G01N27/26;H01L41/04 |
主分类号 |
G01N27/26 |
| 代理机构 |
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