RADIAL CONTACT FOR NANOWIRES

摘要

An embodiment is a method and apparatus of radial contact using nanowires. An inner contact has a center. An outer contact surrounds the inner contact around the center and is spaced from the inner contact by a channel length. A nanowire connects the center of the inner contact and the outer contact in a rotationally invariant geometry. Another embodiment is a method and apparatus of a semiconductor device with bottom gate structure and having radial contact using nanowires. A gate electrode is deposited on a substrate. A dielectric layer is deposited on the substrate and the gate electrode. A source-drain assembly is deposited on the dielectric layer. The source-drain assembly has source and drain electrodes connected via a nanowire in a rotationally invariant geometry. Another embodiment is a method and apparatus of a semiconductor device with top gate structure and having radial contact using nanowires. An isolation barrier layer is deposited on a substrate. A source-drain assembly is deposited on the substrate and within the isolation barrier layer. The source-drain assembly has source and drain electrodes connected via a nanowire in a rotationally invariant geometry. A dielectric layer is deposited on the source-drain assembly. A gate electrode is deposited on the dielectric layer. Another embodiment is a method and apparatus of a semiconductor device having radial contact using nanowires of short lengths. Source and drain electrodes are fabricated having a contact structure with a rotationally invariant geometry. The contact structure has inner and outer contacts corresponding to the source and drain electrodes, respectively. The outer contact is spaced from the inner contact by a channel length. Wells are formed in vicinity of the contact structure. A suspension is placed in the wells. The suspension has single or multiple nanowires having a short length in a liquid. An alternating current (AC) source is applied to the contact structure to cause the single or multiple nanowires to align and connect the inner contact to the outer contact. The AC source has a first terminal connected to the inner contact and a second terminal not connected to the inner and outer contacts.