| 摘要 |
PURPOSE: An imprinting apparatus is provided to ensure the optimum process condition by selecting the material and method of the pressing unit according to the material of resin and a mold or the size of a substrate. CONSTITUTION: An imprinting apparatus(10) comprises a lower chamber(100), an upper chamber(200), a pressing unit, and a vacuum pump. The lower chamber comprises a UV(Ultraviolet) lamp(110) which irradiates light to photo-curable resin(2) to be cured and quartz glass(120) which supports a substrate on which the photo-curable resin is set. The upper chamber includes side walls(210) and a top surface(220) for forming a space(230) and is arranged on the top of the lower chamber to seal the space. The pressing unit is detachably arranged on the upper chamber by tightly contacting the side walls and lowered by hydraulic pressure to press a mold(3) against the substrate. The vacuum pump evacuates the space or supplies hydraulic pressure to the space.
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