| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for high speed autofocusing to enable high throughput, automatic inspection of electronic parts. SOLUTION: The method optimizes inspection speed during optical inspection of parts in high light, low light and fluorescent light applications. There are described the autofocus mechanism and the method optimized for fluorescent and non-fluorescent applications that when combined with a high speed CCD camera and high numerical aperture (NA) optical parts, achieves superior signal to noise ratio, resolution, and inspection speed performance. COPYRIGHT: (C)2011,JPO&INPIT |
