发明名称 DEPOSITION SOURCE AND METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DEVICE
摘要 PURPOSE: A deposition source and method of manufacturing organic light emitting device are provided to improve the uniformity and property of a deposition film. CONSTITUTION: A deposition source comprises a heating source, a heat transfer plate(120), a planarization layer and a coil part(110). The heating source is formed to supply heats to the peripheral region of the heat transfer plate. The heat transfer plate is transmitted the heat generated from the heating source. The coil part is arranged in entire heat transfer plate.
申请公布号 KR20110033587(A) 申请公布日期 2011.03.31
申请号 KR20090091140 申请日期 2009.09.25
申请人 SAMSUNG MOBILE DISPLAY CO., LTD. 发明人 LEE, JUNG MIN;LEE, CHOONG HO;PARK, SOO JIN
分类号 C23C14/26;H01L51/56;H05B33/10 主分类号 C23C14/26
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