发明名称 |
APPARATUS AND PROCESS FOR CRYSTAL GROWTH |
摘要 |
The present invention relates to an apparatus for vapour phase crystal growth to produce multiple single crystals in one growth cycle comprising one central source chamber, a plurality of growth chambers, a plurality of passage means adapted for transport of vapour from the source chamber to the growth chambers, wherein the source chamber is thermally decoupled from the growth chambers.
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申请公布号 |
US2011073034(A1) |
申请公布日期 |
2011.03.31 |
申请号 |
US20100904434 |
申请日期 |
2010.10.14 |
申请人 |
DURHAM SCIENTIFIC CRYSTALS LIMITED |
发明人 |
BASU ARNAB;ROBINSON MAX;CANTWELL BEN;BRINKMAN ANDY |
分类号 |
C30B35/00;C30B23/00;C30B29/48 |
主分类号 |
C30B35/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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