| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion beam irradiation apparatus capable of controlling the diameter and intensity of an ion beam. SOLUTION: An ion beam irradiation device 5 includes an aperture device 20 provided with an aperture opening 51 through which ion beams pass. The aperture device 20 is arranged along the circumference of a circle whose center is an arrangement center located within the aperture opening 51. The aperture device has three or more shield blades 22, a frame 21 surrounding the aperture opening 51, and a rotation shaft located at a position fixed with respect to the frame 21. The circumference of the aperture opening 51 is formed of part of the hem, which is an edge facing the arrangement center, of each of the shield blades 22. The space between the circumference of the aperture opening 51 and the frame 21 is shielded by the shield blades 22. The shield blades 22 are formed to be rotatable around the rotation shaft by a predetermined angle. The ion beam irradiation device 5 has a control unit that rotates the shield blades 22 by the same angle, to thereby change the size of the aperture opening 51. COPYRIGHT: (C)2011,JPO&INPIT |
