发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a semiconductor device that prevents erroneous reading after being programmed with high reliability, and to provide a method of manufacturing the same. <P>SOLUTION: The semiconductor device includes: a gate oxide film 3 formed in a channel area on a semiconductor substrate 1; a gate electrode 4 formed on the gate oxide film 3; and a silicide layer 2 formed on at least the channel area. The silicide layer 2 clads at least part of an area except for the entire gate electrode 4 among the channel areas. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2011066240(A) 申请公布日期 2011.03.31
申请号 JP20090216104 申请日期 2009.09.17
申请人 TOSHIBA CORP 发明人 SHIMIZU SAKIKO
分类号 H01L27/10;H01L21/28;H01L21/3205;H01L21/768;H01L23/52;H01L29/78 主分类号 H01L27/10
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