| 摘要 |
PROBLEM TO BE SOLVED: To provide a holding mechanism holding a panel inspection device and capable of damping impact based on the movement of a holding means. SOLUTION: The holding mechanism 100 holding the inspection device 2 of a panel 1 includes: the holding means 102 for holding the inspection device 2; a moving means 104 for moving the holding means 102 for adjusting the position of the inspection device 2 in a height direction; a damping means 106 for damping the impact based on the movement of the holding means 102; and a control means 108 for controlling the damping means 106 so that the sum of the weights of the inspection device 2 and the holding means 102 may be supported. COPYRIGHT: (C)2011,JPO&INPIT
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