| 摘要 |
PROBLEM TO BE SOLVED: To overcome problems in a hot air circulation type multistage heating and drying device used as the heating and drying device for an organic EL, wherein even though the device has good space efficiency and can be made to be a device at relatively low cost, the device is not capable of keeping a heating furnace at an inert gas atmosphere when carrying in/out substrates, so that its process treatment time becomes long, thereby the device is not suitable for mass production facility as a property shows unevenness caused by deterioration of an organic function layer. SOLUTION: The heating and drying device has a multistage load lock chamber 5 at a substrate carrying in/out part of the hot air circulation type multistage heating and drying device, so that the substrate A can be carried in/out by each stage while retaining the inert gas atmosphere and a heating temperature inside a heating furnace 2. COPYRIGHT: (C)2011,JPO&INPIT
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