| 摘要 |
PROBLEM TO BE SOLVED: To downsize, reduce weight, and decrease an effect of magnetic field on an electron beam in a stage device applicable to the device intended for inspection or evaluation of semiconductors such as a length measurement SEM. SOLUTION: On a base 104 having the nearly same size as the smallest dimension that is decided depending on the size of a top table 101 and a movable stroke, linear motors 110, 111, 112, 113 are arranged on four sides so as to be kept far from the electron beam irradiating position (center of the stage device). Linear motor stators 110, 112 are constituted in a "U-shaped" structure that has an aperture facing outward of the device. Moreover, coupling of the movable table and the top table is carried out by linear guides 107, 109 using non-magnetic materials or by a roller mechanism using the non-magnetic materials. COPYRIGHT: (C)2011,JPO&INPIT
|
