| 摘要 |
A method of analyzing production steps includes inputting application data associated with a production process having a plurality of process steps into a memory with each of the plurality of process steps including a plurality of tools. The method also includes loading process data associated with one of the plurality of process steps into the memory, performing a tool commonality analysis on each of the tools associated with the at least one of the plurality of process steps, identifying all tool-to-tool differences for the at least one of the plurality of process steps, performing a tool stratification analysis to identify one of the plurality of tools that provides the largest variance contribution to the at least one of the plurality of process steps, and stopping the one of the plurality of tools that provides the largest variance contribution to the at least one of the plurality of process steps.
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